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Nonlinear analysis of a new parametric tunable resonance MEMS device using a shallow arched beam
Last modified: 2017-05-20
Abstract
We use a MEMS based shallow arched microbeam actuated by an electrostatic force using a combination of DC and AC voltages to design a resonant filter for RF applications. The device can be tuned using a variable axial force applied through a second parallel plate capacitor placed in the longitudinal direction (Fig. 1).
We derive the equation of motion and associated boundary conditions governing the motion of the initially curved beam (shallow arched beam) using the Hamilton’s principle. The associated nonlinear integro-partial-differential equations are reduced to a nonlinear ordinary differential system using the Differential Quadrature Method (DQM) that discretizes the space derivatives. The limit-cycle solutions are obtained by using a Finite Difference Method (FDM) that estimates the displacement and velocity solutions over one steady state period.
The results show that the passband frequencies can be tuned thanks to the applied axial force allowing reconfigurable performances of the filtering device.
We derive the equation of motion and associated boundary conditions governing the motion of the initially curved beam (shallow arched beam) using the Hamilton’s principle. The associated nonlinear integro-partial-differential equations are reduced to a nonlinear ordinary differential system using the Differential Quadrature Method (DQM) that discretizes the space derivatives. The limit-cycle solutions are obtained by using a Finite Difference Method (FDM) that estimates the displacement and velocity solutions over one steady state period.
The results show that the passband frequencies can be tuned thanks to the applied axial force allowing reconfigurable performances of the filtering device.