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BIFURCATION TOPOLOGY TUNING IN IMPERFECT CIRCULAR MICROPLATES UNDER ELECTROSTATIC ACTUATION
Last modified: 2017-05-20
Abstract
Precise modeling of circular microplates is very important to build an optimized design and to understand its behavior. In this paper, a computational model for the nonlinear oscillations of circular microplates under primary resonance is developed. The continuous model includes geometric imperfection, mechanical and electrostatic nonlinearities. The Galerkin method is used to transform the nonlinear partial differential equation into a finite degrees of freedom system, which is numerically solved using the harmonic balance method (HBM) coupled with the asymptotic numerical method (ANM). Several numerical simulations have been performed in order to investigate the influence of actuation voltages and geometric imperfection on the nonlinear frequency response of the considered MEMS. The proposed model enables the capture of the main nonlinear phenomena in imperfect circular microplates and describes the competition between the hardening and the softening behavior. In practice, the bifurcation topology of the resulting nonlinear behavior can be tuned with respect to the DC voltage and the initial deflection of the microplate.